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Model SRD is designed to dry two or four carriers simultaneously.
¡¡ With a clean filter installed in the upper part,clean air is constantly introduced to the inside of
¡¡

Áß°í Spin rinse dryer

      À缺¿£Áö´Ï¾î¸µÀº Áß°í semitool, verteqÀÇ ½ºÇÉ ¸°½ºµå¶óÀ̾ ¼öÀÔÇÏ¿© ÆǸŠ¹× ¼³Ä¡ÇÏ°í ÀÖ½À´Ï´Ù. ¶ÇÇÑ semitool(STi), verteq¸¦ °í°´ÀÇ ¿ä±¸´ë·Î °³Á¶Çϸç, °¢Á¾ ºÎÇ°À» °ø±ÞÇÏ°í ÀÖ½À´Ï´Ù.

 

Áß°í spin rinse dryer

 

                

 

 

 

    -Static eliminator(ionizer)
    -
    Hot air generator
    -
    Cradles of different sizes
    -
    D.IW rinsing mechanism
    -
    N2 blow mechanism
    -
    Special specifications/Spin dryers   available for glass substrates and   ceramic substrates.

 

1 cassette type

Model semitool, verteq (¼¼¹ÌÅø, ¹öÅØ)
1-carrier type 4, 5, 6, 8 , 12inch and solarcell wafers
Processing time ¡¡Spin0¢¦999.9sec(variable), rinse 0~999.9
¡¡Dry0¢¦999.9sec(variable)
filter 0.1¥ìm, filtration 99.9995% or over.
Dry Hot Nitrogen
Exhaust One place on the back.
Shaft seal Special seal
Power supply AC220V, 60Hz

 

 

 

 

 

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