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 Spin coaters



   Spin coating is a procedure used to apply uniform thin films to flat substrates. In short, an excess amount of a solution is placed on the substrate, which is then rotated at high speed in order to spread the fluid by centrifugal force.

     Rotation is continued while the fluid spins off the edges of the substrate, until the desired thickness of the film is achieved. The applied solvent is usually volatile, and simultaneously evaporates. So, the higher the angular speed of spinning, the thinner the film. The thickness of the film also depends on the concentration of the solution and the solvent.

   Spin coating is widely used in microfabrication, generally where it can be used to create thin films with thicknesses below 10 um. It is used intensively in photolithography, to deposit layers of photoresist about 1~100 micrometre thick. Photoresist is typically spun at 20 to 80 revolutions per second for 30 to 60 seconds.



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