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          - OLED ÁõÂø FMM(fine metal mask) Á¦ÀÛ¿ë

               ¸¶½ºÅ©¾ó¶óÀÌ³Ê Á¦ÀÛ

        

           - ½ºÄµÅ¸ÀÔ ¸¶½ºÅ©¾ó¶óÀÌ³Ê Á¦ÀÛ

 

                                   

  

 

UV LED ¸¶½ºÅ©¾ó¶óÀÌ³Ê (UV LED mask aligner)

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COOLUV-100

COOLUV-125

COOLUV-200

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Dual CCD camera, monitor

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365, 405 nm UV LED lamp

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³ë±¤¿ë ŸÀ̸Ó

0~999 sec. digital timer

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Áø           °ø

0.5~0.8 Kg/CM2

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Áø°øÈíÂø °íÁ¤½Ä

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¸¶½ºÅ© ±Û·¡½º

Áø°øÈíÂø °íÁ¤½Ä(Çʸ§ ¸¶½ºÅ© »ç¿ë°¡)

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mask size

 5"x5"

 6"x6"

 9"x9"

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Áø°øÈíÂø °íÁ¤½Ä

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½Ã           ·á

Áø°øÈíÂø °íÁ¤½Ä

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wafer size

diameter 100mm 

dia. 125mm 

dia. 200mm 

½Ã ·á   µÎ ²²

ÃÖ´ë 2MM

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¸Å´ÏÇ»·¹ÀÌÅÍ À̵¿¹üÀ§

X,Y: ±12 MM, ¹Ìµ¿ 1/8MM 1ȸÀü, Z: 12MM  ,¹Ìµ¿ 0.2 MM,      ¥è: ±7µµ

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resolution

 1um

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Àü       ¿ø

AC 220V 50/60 Hz, 10A

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DIMENSION

1000W  X 800D X 1500H mm(Å×À̺í Æ÷ÇÔ)

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Áß    ·®(º»Ã¼)

100 Kg

120 Kg

150Kg

 

 

 

 

 

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