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UVC-30, UV ozone cleaner

   UVO Cleaner, UVC-30

         Àڿܼ± ¼¼Á¤±â(UV Ozone cleaner) ´Â ±Û·¡½º, Çʸ§ ¹× ±Ý¼Ó Ç¥¸é¿¡ »ý¼ºµÈ À¯±â¹°°ú ¼öºÐÀ» Á¦°ÅÇϸç, Àç·áÀÇ Ç¥¸éÀ» °³ÁúÇÏ¿© Ä£¼ö¼ºÀ» ¶ç°Ô ÇÕ´Ï´Ù. °á°úÀûÀ¸·Î µµÆ÷µÇ°Å³ª ÄÚÆõǴ ¹°ÁúÀÌ ±âÆÇ¿¡ Àß ºÎÂøµÇµµ·Ï ÇÕ´Ï´Ù.

      Àڿܼ± ¼¼Á¤±âÀÇ ·¥ÇÁ¿¡¼­ ¹ß»ýÇÏ´Â 184.9nmÀÇ ÆÄÀåÀº À¯±â¹°À» ºÐÇØÇؼ­ ¼ö¼Ò¿Í ź¼Ò·Î ºÐÇØÇϸç, 253.7nmÀÇ ÆÄÀåÀº »ê¼Ò ºÐÀÚ·Î ºÎÅÍ ¿ÀÁ¸À» ¸¸µé°í À¯±â¹°·ÎºÎÅÍ Á¦°øµÈ ¼ö¼Ò, ź¼Ò¿Í °áÇÕÇÏ¿© À¯±â¹°¿ï Á¦°ÅÇÏ°Ô µË´Ï´Ù.

      ÇÑÆí Àڿܼ± ¼¼Á¤±â¿¡¼­ Á¦°øÇÏ´Â OZONE(O3)´Â °¢Á¾ ±âÆÇÀÇ Ç¥¸é°ú È­ÇÐÀû, ¹°¸®ÀûÀ¸·Î ¹ÝÀÀÇÏ¿© Çʸ§ÀÇ ºÎÂø·ÂÀ» Çâ»ó½Ãŵ´Ï´Ù. ÀÌ·¯ÇÑ ¼º´ÉÀº °í°¡ÀÇ ÇöóÁ Ç¥¸éó¸®ÀåÄ¡¸¦ ´ëüÇÒ ¼ö ÀÖ½À´Ï´Ù, 

 

¼±Åûç¾ç; N2 purge, hot plate µî

 

 

 

 

 

Application

Silicon wafer, GaAs wafer, Sapphire wafer, LCD glass, Mask glass, BGA and CSP electrodes, Thermal heads, Lens and optical components, Metals, Solar cells

 

         Specifications

 

 

Substrate Size

Max. 250x 250x t 4.0mm

 

UV Lamp Low Pressure Mercury Lamp

 

Weve length 185nm, 254nm

 

Work Tray SUS

 

Substrate Alignment No need(any position)

 

Exposure time Digital timer, 1~999sec.

 

Cooling Fan cooling

 

Dimension 455Wx 445Wx 240H mm

 

Weight 15 Kg
 

 

 

 

 

 

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