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Nano spray coating system, ¸ðµ¨ Spincube-100

 

 

    ½ºÇÁ·¹ÀÌÄÚÅÍ, ¸ðµ¨ Spincube 100Àº Á÷±³ÁÂÇ¥ ·Îº¿ ¹× ½ºÇÉ È¦´õ¿¡ ÀÇÇÑ ÃÖ»óÀÇ ±ÕÀÏÇÑ ÄÚÆà Á¶°ÇÀ» Á¦°øÇÕ´Ï´Ù. º» ½ºÇÁ·¹ÀÌ ÄÚÆà ½Ã½ºÅÛÀº ÃÊÀ½ÆÄ ³ëÁñÀ» Àû¿ëÇÏ¿© ÄÚÆÃÇÏ·Á´Â ½Ã·á¸¦ 10 ¸¶ÀÌÅ©·ÐÀÇ Å©±â·Î atomizing ½ÃÄÑ ºÐ¹«ÇÏ´Â µ¿½Ã¿¡, ½Ã·á¸¦ ȸÀü½ÃÄÑ ±ÕÀÏÇÑ ÄÚÆà ÀÛ¾÷À» ¼öÇàÇÕ´Ï´Ù.

  • Max substrate size:   up to 150x150 mm
  • Ultrasonic spray(or special air spray) coating:   Spray coating programmable parameters: Speed (Y-axis), spin speed, dispensing flow rate
  • Nano spray:    Thin, uniform, defect-free coating application down to sub-micron thickness.
  • Flow pumps for spray coating:    Precise flow control 10µl/s up to 200µl/s for low viscosity resists , water soluble liquids, solar cell fluxing, fuel cell coating and carbon nano tube coating.

 

 

Reliability

  • Anodized aluminum and All polished stainless 304 construction
  • Exhaust port
  • Optional UV and NIR curing
  • 1 ³â°£ Ç°Áú º¸Áõ ( ºÎÇ° ¹× ÀηÂ)
  • °í°´¿¡ ´ëÇÑ ¹«Á¦ÇÑ application Á¦°ø

 

ÇÁ·Î±×·¥ ¹× Hardware

  • Y- axis position and speed settable
  • Spin chuck RPM:  variable
  • Y-axis moving speed: 0 - 100mm/ sec.
  • Z stroke adjustable manually
  • Programmable logic controller (PLC) system controller
  • Standardl dispenser-Precise flow control 10µl/s up to 200µl/s for low viscosity liquids 

 

 

 

 

 

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