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Spin Coater JS301             catalog    JS301-100   JS301-150    JS301-200    

 

     »ç¿ëÀÚ¿¡°Ô Æí¸®ÇÑ ¾Æ³¯·Î±× ¹æ½ÄÀ¸·Î ÇÁ·Î±×·¥À» ÇÒ ¼ö ÀÖ´Â JS301 ¸ðµ¨Àº °í°´ÀÇ Áß¿äÇÑ ½ÇÇè¿¡¼­ Á¤È®µµ¿Í ½Å·Úµµ¸¦ Á¦°øÇÕ´Ï´Ù. ÀÜ°íÀåÀÌ ÀüÇô¾ø°í, »ç¿ëÀÌ Æí¸®ÇÏ°í, ¼ÒÇüÀ̸ç, °ß°íÇÑ bench top ŸÀÔÀÇ JS301 spin coating systemÀº ´Ù¾çÇÑ ½ÇÇè ¹× °í¼º´ÉÀÌ ÇÊ¿äÇÑ °í°´¿¡°Ô °æÀï·Â ÀÖ´Â °¡°ÝÀ¸·Î Á¦°øµË´Ï´Ù.½º

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  • Spin Speed Repeatability: < 1 %
  • Spin Speed Resolution: < 1 %
  • Substrate Sizes (<1 cm - 300 mm round / 220 by 220 square)ÄÚÅÍ ¸ðµ¨ JS401Àº À缺¿£Áö´Ï¾î¸µÀÇ ±âº»ÀÌ µÇ´Â Á¦Ç°À¸·Î½á, 2003³â °³¹ßµÈ ÀÌ·¡, °è¼Ó ÁøÈ­µÇ°í ÀÖÀ¸¸ç µ¿±Þ»ç¾çÀÇ ¿Ü»ê

 

 

     Reliability

  • PP and stainless 304 construction
  • 1 ³â°£ Ç°Áú º¸Áõ ( ºÎÇ° ¹× ÀηÂ)
  • °í°´¿¡ ´ëÇÑ ¹«Á¦ÇÑ application Á¦°ø
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ÇÁ·Î±×·¥ ¹× Hardware

  • Digital RPM display and 3 digital timers
  • Max. wafer: 4"(JS301-100), 6"(JS301-150), 8"(JS301-200)
  • 3 steps per program
  • 1 second resolution for step times
  • Max Spin speed 4 - 6,000 rpm
  • Spin speed acceleration:
    • 0 - 10,000 rpm/sec unloaded
    • 0 - 6,000 rpm/sec with 100 mm SI wafer
  • Robust structure
  • Security: Vacuum chuck interlock

 

 

 

 

 

 

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