About         Products and Solutions       Gallery    Services         Contact us

 

          

        

 

        

Spin Developer JS2D-200       JS2D-500

 

Spin developer, JS2D-200

       Æ÷Å丮¼Ò±×·¡ÇÇÀÇ ÇÑ °øÁ¤ÀÎ ·¹Áö½ºÆ®ÀÇ Çö»ó(developing) ÀÛ¾÷¿ëÀ̸ç,  ¿þÀÌÆÛ, ¼¼¶ó¹Í±âÆÇ ¹× ±Û·¡½º¸¦ Çö»ó, ¼¼Á¤ ¹× °ÇÁ¶ÇÕ´Ï´Ù.      Çö»ó¾× ¶Ç´Â ¾àÇ°ÀÇ ºÐ»ç ½Ã°£À» ÀÔ·ÂÇÏ¿© ¿øÇÏ´Â °á°ú¸¦ ¾òÀ» ¼ö ÀÖ½À´Ï´Ù.

      »ç¿ëÇϱâ Æí¸®ÇÏ°í, °ß°íÇÕ´Ï´Ù.½º½º

  • ¿þÀÌÆÛ loading ¹× unloading:  manual
  • ¾Ð·Â¿ë±â ¹× regurator Á¦°ø
  • Substrate Sizes: Max. 12" diameter ÄÚÅÍ ¸ðµ¨ JS401Àº À缺¿£Áö´Ï¾î¸µÀÇ ±âº»ÀÌ µÇ´Â Á¦Ç°À¸·Î½á, 2003³â °³¹ßµÈ ÀÌ·¡, °è¼Ó ÁøÈ­µÇ°í ÀÖÀ¸¸ç µ¿±Þ»ç¾çÀÇ ¿Ü»ê

 

 

Reliability

  • All PVC, PE, PTFE construction
  • Drain a port located in the bottom
  • of the bowl

  • D.I rinse and N2 dry
  • 1 ³â°£ Ç°Áú º¸Áõ ( ºÎÇ° ¹× ÀηÂ)
  • °í°´¿¡ ´ëÇÑ ¹«Á¦ÇÑ application
  • Á¦°ø

 

ÇÁ·Î±×·¥ ¹× Hardware

  • LCD touch screen
  • Wafer Size:     12" or less
  • Chamber Material:     PVC
  • 20 process programs
  • 10 steps per program (nozzle location settable)
  • Moving chenical nozzle spraying evenly
  • Spin Motor:     AC servo Motor
  • Spin Rotation:     Max. 1500 RPM
  • Rotation Controller:     PLC
  • Power Supply:     AC220V
  • N2 source:     0.2MPa , 50L/min, Ø6 connection
  • D.I water rinsing source:     0.2MPa, 10L/min, PT 1/2 connection
  • Drainage:     1 lines, PVC-25A
  • Body Size/ Material: 1200Wx100DX1800H mm/PVC

 

 

 

 

 

© 1992-2010 Jaesung Engineering Co., All Rights Reserved.